<abstract xmlns="http://www.w3.org/1999/xhtml"><p>Porous Silicon Sensors have been fabricated and tested successfully over the last few years as humidity sensors, vapour sensors, gas sensors, piezoresistive pressure sensors and bio- sensors. In each case it has displayed remarkably sensitivity, relatively low temperature operation and ease of fabrication. Brief description of fabrication and properties of all these types of different sensors is reported in this paper. The barriers of porous silicon like contact, non- uniformity, instability etc. are also discussed.</p></abstract>

Porous Silicon Sensors have been fabricated and tested successfully over the last few years as humidity sensors, vapour sensors, gas sensors, piezoresistive pressure sensors and bio- sensors. In each case it has displayed remarkably sensitivity, relatively low temperature operation and ease of fabrication. Brief description of fabrication and properties of all these types of different sensors is reported in this paper. The barriers of porous silicon like contact, non- uniformity, instability etc. are also discussed.

Porous Silicon Sensors- Elusive and Erudite

International Journal on Smart Sensing and Intelligent Systems

This work is licensed under the Creative Commons Attribution-NonCommercial-NoDerivatives 4.0 International License.

{"article-title":"Porous Silicon Sensors- Elusive and Erudite"}

Porous Silicon Sensors have been fabricated and tested successfully over the last few years as humidity sensors, vapour sensors, gas sensors, piezoresistive...

Porous Silicon Sensors- Elusive and Erudite

Online veröffentlicht: 13. Dez. 2017

Seitenbereich: 34 - 56

DOI: https://doi.org/10.21307/ijssis-2017-277

Schlüsselwörter
Porous Silicon, Sensing application, Barriers of porous silicon

© 2008 H. Saha et al., published by Sciendo

This work is licensed under the Creative Commons Attribution-NonCommercial-NoDerivatives 4.0 International License.

Porous Silicon Sensors- Elusive and Erudite

Online veröffentlicht: 13. Dez. 2017

Seitenbereich: 34 - 56

DOI: https://doi.org/10.21307/ijssis-2017-277

SchlüsselwörterPorous Silicon, Sensing application, Barriers of porous silicon

© 2008 H. Saha et al., published by Sciendo

This work is licensed under the Creative Commons Attribution-NonCommercial-NoDerivatives 4.0 International License.

Schlüsselwörter
Porous Silicon, Sensing application, Barriers of porous silicon