<abstract xmlns="http://www.w3.org/1999/xhtml"><p>This work presents the very first results of the application of plasma magnetic filtering achieved by a coil coupled with an electrical circuit of a coaxial accelerator during the synthesis of A1N thin films by use of Impulse Plasma Deposition method (IPD). The uniqueness of this technical solution lies in the fact that the filter is not supplied, controlled and synchronized from any external device. Our solution uses the energy from the electrical circuit of plasma accelerator. The plasma state was described on the basis of OES studies. Estimation of the effects of plasma filtering on the film quality was carried out on the basis of characterization of structure morphology (SEM), phase and chemical composition (vibrational spectroscopy). Our work has shown that the use of the developed magnetic self-filter improved the structure of the AlN coatings synthesized under the condition of impulse plasma, especially by the minimization of the tendency to deposit metallic aluminum droplets and columnar growth.</p></abstract>

This work presents the very first results of the application of plasma magnetic filtering achieved by a coil coupled with an electrical circuit of a coaxial accelerator during the synthesis of A1N thin films by use of Impulse Plasma Deposition method (IPD). The uniqueness of this technical solution lies in the fact that the filter is not supplied, controlled and synchronized from any external device. Our solution uses the energy from the electrical circuit of plasma accelerator. The plasma state was described on the basis of OES studies. Estimation of the effects of plasma filtering on the film quality was carried out on the basis of characterization of structure morphology (SEM), phase and chemical composition (vibrational spectroscopy). Our work has shown that the use of the developed magnetic self-filter improved the structure of the AlN coatings synthesized under the condition of impulse plasma, especially by the minimization of the tendency to deposit metallic aluminum droplets and columnar growth.

The application of magnetic self-filter to optimization of AIN film growth process during the impulse plasma deposition synthesis

Faculty of Materials Science and Engineering, Warsaw University of Technology, Woloska 141, 02-507 Warsaw,

National Centre for Nuclear Research (NCBJ), Andrzeja Soltana 7, 05-400 Otwock-Swierk,

Materials Science-Poland

This work is licensed under the Creative Commons Attribution-NonCommercial-NoDerivatives 3.0 License.

This work presents the very first results of the application of plasma magnetic filtering achieved by a coil coupled with an electrical circuit of a coaxial...

The application of magnetic self-filter to optimization of AIN film growth process during the impulse plasma deposition synthesis

Article Category: Research Article

Online veröffentlicht: 27. Apr. 2016

Seitenbereich: 126 - 131

Eingereicht: 21. Juli 2015

Akzeptiert: 16. Nov. 2015

DOI: https://doi.org/10.1515/msp-2016-0007

Schlüsselwörter
IPD method, magnetic filter, nanocrystalline films, thin films

© Wroclaw University of Technology

This work is licensed under the Creative Commons Attribution-NonCommercial-NoDerivatives 3.0 License.

The application of magnetic self-filter to optimization of AIN film growth process during the impulse plasma deposition synthesis

Article Category: Research Article

Online veröffentlicht: 27. Apr. 2016

Seitenbereich: 126 - 131

Eingereicht: 21. Juli 2015

Akzeptiert: 16. Nov. 2015

DOI: https://doi.org/10.1515/msp-2016-0007

SchlüsselwörterIPD method, magnetic filter, nanocrystalline films, thin films

© Wroclaw University of Technology

This work is licensed under the Creative Commons Attribution-NonCommercial-NoDerivatives 3.0 License.

Schlüsselwörter
IPD method, magnetic filter, nanocrystalline films, thin films