<abstract xmlns="http://www.w3.org/1999/xhtml"><p>The paper presents in detail a unique multilevel control architecture designed for the comprehensive management of the DC magnetron sputtering process and of all subsystems of the sputtering equipment. The ultimate goal is to increase the repeatability, stability and the controllability of the complex process. The presented topics include embedded and distributed electronics, data acquisition and supervisory control, networking, data management, redundant local and remote data-archiving. There are presented platform independent algorithms managing the data exchange between computational devices, and conclusions are drawn regarding the efficiency of the various algorithms used.</p></abstract>

The paper presents in detail a unique multilevel control architecture designed for the comprehensive management of the DC magnetron sputtering process and of all subsystems of the sputtering equipment. The ultimate goal is to increase the repeatability, stability and the controllability of the complex process. The presented topics include embedded and distributed electronics, data acquisition and supervisory control, networking, data management, redundant local and remote data-archiving. There are presented platform independent algorithms managing the data exchange between computational devices, and conclusions are drawn regarding the efficiency of the various algorithms used.

Multilevel Distributed Embedded System for Control of the DC Magnetron Sputtering Process

Department of Electrical Engineering, Faculty of Technical and Human Sciences

Acta Universitatis Sapientiae, Electrical and Mechanical Engineering

This work is licensed under the Creative Commons Attribution-NonCommercial-NoDerivatives 3.0 License.

The paper presents in detail a unique multilevel control architecture designed for the comprehensive management of the DC magnetron sputtering process and of...

Multilevel Distributed Embedded System for Control of the DC Magnetron Sputtering Process

Online veröffentlicht: 19. Jan. 2018

Seitenbereich: 43 - 55

Eingereicht: 15. Sept. 2017

DOI: https://doi.org/10.1515/auseme-2017-0009

Schlüsselwörter
sputtering process, multilevel distributed system, embedded electronics, networking, data management

© 2017 Albert-Zsombor Fekete et al., published by De Gruyter Open

This work is licensed under the Creative Commons Attribution-NonCommercial-NoDerivatives 3.0 License.

Multilevel Distributed Embedded System for Control of the DC Magnetron Sputtering Process

Online veröffentlicht: 19. Jan. 2018

Seitenbereich: 43 - 55

Eingereicht: 15. Sept. 2017

DOI: https://doi.org/10.1515/auseme-2017-0009

Schlüsselwörtersputtering process, multilevel distributed system, embedded electronics, networking, data management

© 2017 Albert-Zsombor Fekete et al., published by De Gruyter Open

This work is licensed under the Creative Commons Attribution-NonCommercial-NoDerivatives 3.0 License.

Schlüsselwörter
sputtering process, multilevel distributed system, embedded electronics, networking, data management