[KHATKO, V.—CALDERER, J.—LLOBET, E.—CORREIG, X.: Sensors and Actuators B 109 (2005), 128-134).10.1016/j.snb.2005.03.073]Search in Google Scholar
[GURLO, A.—RIEDEL, R.: IEEE Sensors (2008), 1505-1508.]Search in Google Scholar
[KUHNE, S.—GRAF, M.—TRICOLI, A.—MAYER, F.—PRATSINIS, S. E.—HIERLEMANN, A.: J. Micromech. Microeng. 18 (2008), 035-040.]Search in Google Scholar
[M. J. TOOHEY: Sensors and Actuators B 105 (2005), 232.10.1016/S0925-4005(04)00431-9]Search in Google Scholar
[WANG, X.—YEE, S. S.—CAREY, W. P.: Sensors and Actuators B 25 (1995), 454.10.1016/0925-4005(94)01395-0]Search in Google Scholar
[ANSARI, S. G.—BOROOJERDIAN, P.—SAINKAR, S. R. et al: Thin Solid Films 295 (1997), 271.10.1016/S0040-6090(96)09152-3]Search in Google Scholar
[CHATTOPARHYAY, S. et al: Critical Reviews in Solid State and Materials Sciences 31 (2006), 15-53.]Search in Google Scholar
[WANG, C. Y.—ALI, M.—KUPS, T. et al: Sensors and Actuators B 130 (2008), 589-593.]Search in Google Scholar
[LU, K.—HAMMOND, C.: J. Qian, J. Mater. Sci. 45 (2010), 582-588.10.1007/s10853-009-3930-9]Search in Google Scholar
[LEOPOLD, S.—KRENIN, C.—ULBRICH, A.—KRISCHOCK, S.—HOFFMAN, M.: J. Vac. Sci. Technol. B 29 (2011), 011002-1.]Search in Google Scholar