<abstract xml:lang="en" xmlns="http://www.w3.org/1999/xhtml"><p>A novel approach to the preparation of thin films by using RF diode sputtering was developed. In one deposition run, thin films of doped ZnO:(Al, Ga) were obtained with different structural, optical and electrical properties. ZnO: Al films of low resistivities in order of 10<sup>-3</sup>Ωcm and high optical transmittances about 93% have appeared the most suitable for photovoltaic applications.</p></abstract>

A novel approach to the preparation of thin films by using RF diode sputtering was developed. In one deposition run, thin films of doped ZnO:(Al, Ga) were obtained with different structural, optical and electrical properties. ZnO: Al films of low resistivities in order of 10-3Ωcm and high optical transmittances about 93% have appeared the most suitable for photovoltaic applications.

Zinc Oxide — A Unique Material for Advanced Photovoltaic Solar Cells

Department of Microelectronics, Slovak University of Technology, Ilkovičova 3, 812 19 Bratislava, Slovakia

Journal of Electrical Engineering

{"article-title":"Zinc Oxide \u2014 A Unique Material for Advanced Photovoltaic Solar Cells"}

A novel approach to the preparation of thin films by using RF diode sputtering was developed. In one deposition run, thin films of doped ZnO:(Al, Ga) were...

Zinc Oxide — A Unique Material for Advanced Photovoltaic Solar Cells

Published Online: Jun 07, 2011

Page range: 291 - 295

DOI: https://doi.org/10.2478/v10187-010-0043-2

Keywords
thin film solar cell, Zinc oxide, sputtering

This content is open access.

Zinc Oxide — A Unique Material for Advanced Photovoltaic Solar Cells

Published Online: Jun 07, 2011

Page range: 291 - 295

DOI: https://doi.org/10.2478/v10187-010-0043-2

Keywordsthin film solar cell, Zinc oxide, sputtering

This content is open access.

Keywords
thin film solar cell, Zinc oxide, sputtering