<abstract xmlns="http://www.w3.org/1999/xhtml">

<p>Microelectromechanical system (MEMS) has been highly valued since the size of the MEMS structure is miniaturized, the spacing between the components is in the nanometer range, and the behaviors of friction and adhesion greatly affect the reliability of MEMS. An atomic force microscope (AFM) was used to observe the surface morphology of carbon nanotube (CNT)/polymethyl methacrylate (PMMA) film, and X-ray photoelectron spectroscopy (XPS) was used to analyze the chemical state of typical elements on the surface of the film. The friction and wear properties of composite nano-films under macroscopic conditions were systematically studied. The research results show that the composite nano-film has excellent anti-friction and anti-wear properties.</p>
</abstract>

Microelectromechanical system (MEMS) has been highly valued since the size of the MEMS structure is miniaturized, the spacing between the components is in the nanometer range, and the behaviors of friction and adhesion greatly affect the reliability of MEMS. An atomic force microscope (AFM) was used to observe the surface morphology of carbon nanotube (CNT)/polymethyl methacrylate (PMMA) film, and X-ray photoelectron spectroscopy (XPS) was used to analyze the chemical state of typical elements on the surface of the film. The friction and wear properties of composite nano-films under macroscopic conditions were systematically studied. The research results show that the composite nano-film has excellent anti-friction and anti-wear properties.

The preparation of CNT/PMMA composite film on SiO<sub>2</sub> substrates

School of artificial intelligence and application, Shanghai Urban Construction Vocational College

Materials Science-Poland

This work is licensed under the Creative Commons Attribution-NonCommercial-NoDerivatives 4.0 International License.

The preparation of CNT/PMMA composite film on SiO substrates

Microelectromechanical system (MEMS) has been highly valued since the size of the MEMS structure is miniaturized, the spacing between the components is in the...

The preparation of CNT/PMMA composite film on SiO₂ substrates

Published Online: May 16, 2022

Page range: 639 - 645

Received: Dec 16, 2021

Accepted: Mar 25, 2022

DOI: https://doi.org/10.2478/msp-2022-0001

Keywords
Carbon Nanotube/Polymethyl methacrylate, Micro-Electro-Mechanical System, on Nanotube RCNT (retraction Carbon Nanotube), PMDA (Pyromellitic dianhydride), ODA (Octadecylamine)

© 2021 Jian Li, published by Sciendo

This work is licensed under the Creative Commons Attribution-NonCommercial-NoDerivatives 4.0 International License.

The preparation of CNT/PMMA composite film on SiO2 substrates

Published Online: May 16, 2022

Page range: 639 - 645

Received: Dec 16, 2021

Accepted: Mar 25, 2022

DOI: https://doi.org/10.2478/msp-2022-0001

KeywordsCarbon Nanotube/Polymethyl methacrylate, Micro-Electro-Mechanical System, on Nanotube RCNT (retraction Carbon Nanotube), PMDA (Pyromellitic dianhydride), ODA (Octadecylamine)

© 2021 Jian Li, published by Sciendo

This work is licensed under the Creative Commons Attribution-NonCommercial-NoDerivatives 4.0 International License.

The preparation of CNT/PMMA composite film on SiO₂ substrates

Keywords
Carbon Nanotube/Polymethyl methacrylate, Micro-Electro-Mechanical System, on Nanotube RCNT (retraction Carbon Nanotube), PMDA (Pyromellitic dianhydride), ODA (Octadecylamine)