<abstract xmlns="http://www.w3.org/1999/xhtml">

<p>Micro/Nano electromechanical systems based Mass sensors are being increasingly used for detecting very low masses, with significant applications in bio-sensing as well as environmental sensing. A number of different shapes, excitation mechanisms as well as materials have been suggested for these sensors. In addition, with reducing dimensions due to improvement in fabrication, these sensors have the potential to measure bacterial level masses. This paper reviews some of the research directions in this field. Various sensing and actuation strategies for these resonators are discussed. In addition, three important challenges, which have the potential of providing new directions of research are also explored. These include quality factor, increasing nonlinearity and coupling. Coupling of sensors can provide a unique opportunity to build several resonant sensors on the same chip and reduce the number of contacts required as well as the potential bandwidth</p>
</abstract>

Micro/Nano electromechanical systems based Mass sensors are being increasingly used for detecting very low masses, with significant applications in bio-sensing as well as environmental sensing. A number of different shapes, excitation mechanisms as well as materials have been suggested for these sensors. In addition, with reducing dimensions due to improvement in fabrication, these sensors have the potential to measure bacterial level masses. This paper reviews some of the research directions in this field. Various sensing and actuation strategies for these resonators are discussed. In addition, three important challenges, which have the potential of providing new directions of research are also explored. These include quality factor, increasing nonlinearity and coupling. Coupling of sensors can provide a unique opportunity to build several resonant sensors on the same chip and reduce the number of contacts required as well as the potential bandwidth

On Mass Sensing Using Micro/Nano Resonators - Approaches, Challenges And Directions

International Journal on Smart Sensing and Intelligent Systems

This work is licensed under the Creative Commons Attribution-NonCommercial-NoDerivatives 4.0 International License.

Micro/Nano electromechanical systems based Mass sensors are being increasingly used for detecting very low masses, with significant applications in bio-sensing...

On Mass Sensing Using Micro/Nano Resonators - Approaches, Challenges And Directions

Published Online: Mar 01, 2016

Page range: 1 - 20

Received: Dec 14, 2015

Accepted: Jan 01, 2016

DOI: https://doi.org/10.21307/ijssis-2017-856

Keywords
Microelectromechanical systems, Mass sensors, damping, nonlinearity, coupled systems

© 2016 Bhaskar Choubey et al., published by Sciendo

This work is licensed under the Creative Commons Attribution-NonCommercial-NoDerivatives 4.0 International License.

On Mass Sensing Using Micro/Nano Resonators - Approaches, Challenges And Directions

Published Online: Mar 01, 2016

Page range: 1 - 20

Received: Dec 14, 2015

Accepted: Jan 01, 2016

DOI: https://doi.org/10.21307/ijssis-2017-856

KeywordsMicroelectromechanical systems, Mass sensors, damping, nonlinearity, coupled systems

© 2016 Bhaskar Choubey et al., published by Sciendo

This work is licensed under the Creative Commons Attribution-NonCommercial-NoDerivatives 4.0 International License.

Keywords
Microelectromechanical systems, Mass sensors, damping, nonlinearity, coupled systems