Preparation of MoO3 Thin Films by Spray Pyrolysis and its Gas Sensing Performance
, , , , , and | Sep 01, 2012
About this article
Published Online: Sep 01, 2012
Page range: 592 - 605
Accepted: Aug 01, 2012
DOI: https://doi.org/10.21307/ijssis-2017-497
© 2012 D. V. Ahire et al., published by Sciendo
This work is licensed under the Creative Commons Attribution-NonCommercial-NoDerivatives 4.0 International License.
MoO3 thin films have been prepared by a simple spray pyrolysis technique at substrate temperature 250°c. The structure and morphology of thin films are characterized by X-ray powder diffraction (XRD), scanning electron microscopy and UV-vis spectroscopy. The gas sensing properties of MoO3 thin film is studied at gas concentration 400 ppm and working temperature of 100–400 °c. It was found that the sensitivity depended on the working temperatures and also H2S gas concentration. The results show that the MoO3 thin film can be used to fabricate high performance H2S gas sensors.