<abstract xmlns="http://www.w3.org/1999/xhtml"><italic>RF sputtered SnO2 thin films (90 nm thick) loaded with clusters of nanoscale (8 nm) metal catalysts (Pt, Ag, Ni, Pb, Al, Pd) are investigated for LPG detection. SnO2 film loaded with Pt catalyst clusters exhibits enhanced response (~ 7.5×102) to 200 ppm of LPG at a relatively low operating temperature (185oC) with a fast response time of 100s. Variation of thickness of Pt clusters in the nanoscale range (2 to 20 nm) is seen to significantly influence the sensor response characteristics. Enhanced performance is observed for SnO2 thin films loaded with 10 nm thick platinum clusters that exhibited a high response (~ 5 x 103) at an operating temperature, of 220° C. Preliminary results indicate the potential application of prepared sensor structure of Pt clusters (10nm)/SnO2 (90 nm)/IDE/glass substrate for efficient detection of LPG at relatively low temperature.</italic></abstract>

RF sputtered SnO2 thin films (90 nm thick) loaded with clusters of nanoscale (8 nm) metal catalysts (Pt, Ag, Ni, Pb, Al, Pd) are investigated for LPG detection. SnO2 film loaded with Pt catalyst clusters exhibits enhanced response (~ 7.5×102) to 200 ppm of LPG at a relatively low operating temperature (185oC) with a fast response time of 100s. Variation of thickness of Pt clusters in the nanoscale range (2 to 20 nm) is seen to significantly influence the sensor response characteristics. Enhanced performance is observed for SnO2 thin films loaded with 10 nm thick platinum clusters that exhibited a high response (~ 5 x 103) at an operating temperature, of 220° C. Preliminary results indicate the potential application of prepared sensor structure of Pt clusters (10nm)/SnO2 (90 nm)/IDE/glass substrate for efficient detection of LPG at relatively low temperature.

Enhanced LPG response characteristics of SnO2 thin film based sensors loaded with Pt clusters

International Journal on Smart Sensing and Intelligent Systems

This work is licensed under the Creative Commons Attribution-NonCommercial-NoDerivatives 4.0 International License.

Enhanced LPG response characteristics of SnO thin film based sensors loaded with Pt clusters

RF sputtered SnO2 thin films (90 nm thick) loaded with clusters of nanoscale (8 nm) metal catalysts (Pt, Ag, Ni, Pb, Al, Pd) are investigated for LPG...

Enhanced LPG response characteristics of SnO₂ thin film based sensors loaded with Pt clusters

Published Online: Nov 03, 2017

Page range: 503 - 514

DOI: https://doi.org/10.21307/ijssis-2017-364

Keywords
Gas Sensor, Pt clusters-SnO, Thin films, Sputtering, LPG

© 2009 Divya Haridas et al., published by Sciendo

This work is licensed under the Creative Commons Attribution-NonCommercial-NoDerivatives 4.0 International License.

Enhanced LPG response characteristics of SnO2 thin film based sensors loaded with Pt clusters

Published Online: Nov 03, 2017

Page range: 503 - 514

DOI: https://doi.org/10.21307/ijssis-2017-364

KeywordsGas Sensor, Pt clusters-SnO, Thin films, Sputtering, LPG

© 2009 Divya Haridas et al., published by Sciendo

This work is licensed under the Creative Commons Attribution-NonCommercial-NoDerivatives 4.0 International License.

Enhanced LPG response characteristics of SnO₂ thin film based sensors loaded with Pt clusters

Keywords
Gas Sensor, Pt clusters-SnO, Thin films, Sputtering, LPG