1. bookVolume 16 (2016): Issue 3 (June 2016)
Journal Details
License
Format
Journal
eISSN
1335-8871
First Published
07 Mar 2008
Publication timeframe
6 times per year
Languages
English
access type Open Access

A Novel Quadrature Signal Estimation Method for a Planar Capacitive Incremental Displacement Sensor

Published Online: 11 Jun 2016
Volume & Issue: Volume 16 (2016) - Issue 3 (June 2016)
Page range: 127 - 133
Received: 03 Nov 2015
Accepted: 27 May 2016
Journal Details
License
Format
Journal
eISSN
1335-8871
First Published
07 Mar 2008
Publication timeframe
6 times per year
Languages
English
Abstract

This paper presents a novel phase-shift arctangent (PSA) interpolation method to improve the measurement accuracy of a planar capacitive incremental displacement sensor. Signals of planar capacitive micro-sensors acquire waveform errors, including sensitivity differences and phase-shift errors, because of static errors and dynamic disturbances. In the proposed PSA scheme, such errors are removed completely by loading a particular arctangent function. Moreover, measuring efficiency of the proposed planar capacitive sensors is improved by combining coarse measurement and fine estimation. Experiments show unanimous results to model-based fitting. When electrode length is four times the gap distance, applying the PSA interpolation method decreases waveform errors from more than 4 % to 1.72 %.

Keywords

[1] Barker, M.J., Colclough, M.S. (1997). A two-dimensional capacitive position transducer with rotation output. Review of Scientific Instruments, 68 (8), 3238-3240.10.1063/1.1148273Search in Google Scholar

[2] Yu, H., Zhang, L., Shen, M. (2015). Novel capacitive displacement sensor based on interlocking stator electrodes with sequential commutating excitation. Sensors and Actuators A - Physical, 230, 94-101.10.1016/j.sna.2015.04.024Search in Google Scholar

[3] Ahn, H.J. (2006). A cylindrical capacitive sensor (CCS) for both radial and axial motion measurements. Measurement Science and Technology, 17 (7), 2027-2034.10.1088/0957-0233/17/7/049Search in Google Scholar

[4] Kuijpers, A.A., Krijnen, G.J.M., Wiegerink, R.J., Lammerink, T.S.J., Elwenspoek, M. (2006). A micromachined capacitive incremental position sensor: Part 1. Analysis and simulations. Journal of Micromechanics and Microengineering, 16 (6), S116-S124.Search in Google Scholar

[5] Kim, M., Moon, W., Yoon, E., Lee, K.R. (2006). A new capacitive displacement sensor with high accuracy and long-range. Sensors and Actuators A - Physical, 130, 135-141.10.1016/j.sna.2005.12.012Search in Google Scholar

[6] Huang, X.H., Lee, J.I., Ramakrishnan, N., Bedillion, M., Chu, P. (2010). Nano-positioning of an electromagnetic scanner with a MEMS capacitive sensor. Mechatronics, 20 (1), 27-34.10.1016/j.mechatronics.2009.06.005Search in Google Scholar

[7] Benedek, P., Silvester, P. (1972). Capacitance of parallel rectangular plates separated by a dielectric sheet. IEEE Transactions on Microwave Theory and Techniques, MTT-20 (8), 504-510.10.1109/TMTT.1972.1127797Search in Google Scholar

[8] Wolff, I., Knoppik, N. (1974). Rectangular and circular microstrip disk capacitors and resonators. IEEE Transactions on Microwave Theory and Techniques, MTT-22 (10), 857-864.10.1109/TMTT.1974.1128364Search in Google Scholar

[9] Ahn, H-J., Jeon, S. (2012). Error analysis of a new cylindrical capacitive sensor (CCS) for measuring five-dimensional motions of a rotor. Mechanical Systems and Signal Processing, 29, 148-163.10.1016/j.ymssp.2011.07.027Search in Google Scholar

[10] Heydemann, P.L.M. (1981). Determination and correction of quadrature fringe measurement errors in interferometers. Applied Optics, 20 (19), 3382-3384.10.1364/AO.20.00338220333158Search in Google Scholar

[11] Tan, K.K., Zhou, H.X.X., Lee, T.H. (2002). New interpolation method for quadrature encoder signals. IEEE Transactions on Instrumentation and Measurement, 51 (5), 1073-1079.10.1109/TIM.2002.806028Search in Google Scholar

[12] Hu, H.J., Qiu, X.Q., Wang, J., Ju, A.S., Zhang, Y.B. (2009). Subdivision and direction recognition of lambda/16 of orthogonal fringes for nanometric measurement. Applied Optics, 48 (33), 6479-6484.10.1364/AO.48.00647919935969Search in Google Scholar

[13] Benammar, M., Ben-Brahim, L., Alhamadi, M.A., Al-Naemi, M. (2008). A novel method for estimating the angle from analog co-sinusoidal quadrature signals. Sensors and Actuators A - Physical, 142 (1), 225-231.10.1016/j.sna.2007.02.025Search in Google Scholar

[14] Ryabko, M., Koptyaev, S., Shcherbakov, A., Lantsov, A. (2014). Interferometer-based technology for optical nanoscale inspection. Measurement Science Review, 14 (1), 25-28.10.2478/msr-2014-0004Search in Google Scholar

[15] Sysoev, E., Kulikov, R., Vykhristyuk, I., Chugui, Y. (2015). Correction of scanning steps to improve accuracy in interferometric profilometer. Measurement Science Review, 15 (1), 9-12.10.1515/msr-2015-0002Search in Google Scholar

[16] Yu, J.P., Wang, W., Lu, K.Q., Mei, D.Q., Chen, Z.C. (2013). A planar capacitive sensor for 2D long-range displacement measurement. Journal of Zhejiang University SCIENCE C, 14 (4), 252-257.10.1631/jzus.C12MNT03Search in Google Scholar

Recommended articles from Trend MD

Plan your remote conference with Sciendo