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Journal of Electrical Engineering
Volume 71 (2020): Issue 2 (April 2020)
Open Access
Functional nano-structuring of thin silicon nitride membranes
Milan Matějka
Milan Matějka
,
Stanislav Krátký
Stanislav Krátký
,
Tomáš Řiháček
Tomáš Řiháček
,
Alexandr Knápek
Alexandr Knápek
and
Vladimír Kolařík
Vladimír Kolařík
| May 13, 2020
Journal of Electrical Engineering
Volume 71 (2020): Issue 2 (April 2020)
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Published Online:
May 13, 2020
Page range:
127 - 130
Received:
Dec 19, 2019
DOI:
https://doi.org/10.2478/jee-2020-0019
Keywords
membrane
,
nano optical device
,
electron optics
,
electron beam lithography
,
silicon nitride
,
reactive ion etching
,
silicon etching
,
microfabrication
© 2020 Milan Matějka et al., published by Sciendo
This work is licensed under the Creative Commons Attribution-NonCommercial-NoDerivatives 3.0 License.
Milan Matějka
Institute of Scientific Instruments of the CAS
Brno
Stanislav Krátký
Institute of Scientific Instruments of the CAS
Brno
Tomáš Řiháček
Institute of Scientific Instruments of the CAS
Brno
Alexandr Knápek
Institute of Scientific Instruments of the CAS
Brno
Vladimír Kolařík
Institute of Scientific Instruments of the CAS
Brno