<abstract xmlns="http://www.w3.org/1999/xhtml"><p>We present an optical interference system nanoprofiler MNP-1 designed for high-precision noncontact measurement of surface relief with subnanometer resolution (root mean square of measured values), based on partial scanning of interference signal. The paper describes the construction of the measurement system with Linnik interferometer and the algorithm for nanorelief surface reconstruction. Experimental measurement results of silicon sample with profile height of surface structure of one interatomic distance obtained by MNP-1 are shown. It was proposed to use an atomically smooth surface as the reference mirror in the interferometer MNP-1 that allowed us to measure monatomic steps of the presented silicon sample. Monatomic steps of 0.31 nm in height on silicon (111) surface were measured with resolution up to 5 pm.</p></abstract>

We present an optical interference system nanoprofiler MNP-1 designed for high-precision noncontact measurement of surface relief with subnanometer resolution (root mean square of measured values), based on partial scanning of interference signal. The paper describes the construction of the measurement system with Linnik interferometer and the algorithm for nanorelief surface reconstruction. Experimental measurement results of silicon sample with profile height of surface structure of one interatomic distance obtained by MNP-1 are shown. It was proposed to use an atomically smooth surface as the reference mirror in the interferometer MNP-1 that allowed us to measure monatomic steps of the presented silicon sample. Monatomic steps of 0.31 nm in height on silicon (111) surface were measured with resolution up to 5 pm.

Interferometric Surface Relief Measurements with Subnano/Picometer Height Resolution

Technological Design Institute of Scientific Instrument Engineering

A.V. Rzhanov Institute of Semiconductor Physics

Measurement Science Review

This work is licensed under the Creative Commons Attribution-NonCommercial-NoDerivatives 3.0 License.

We present an optical interference system nanoprofiler MNP-1 designed for high-precision noncontact measurement of surface relief with subnanometer resolution...

Interferometric Surface Relief Measurements with Subnano/Picometer Height Resolution

Published Online: Oct 23, 2017

Page range: 213 - 218

Received: Mar 03, 2017

Accepted: Sep 18, 2017

DOI: https://doi.org/10.1515/msr-2017-0025

Keywords
nanorelief, monatomic steps, low-coherence, white light interferometer, subnanometer resolution

© 2017 Evgeny Sysoev et al., published by De Gruyter Open

This work is licensed under the Creative Commons Attribution-NonCommercial-NoDerivatives 3.0 License.

Interferometric Surface Relief Measurements with Subnano/Picometer Height Resolution

Published Online: Oct 23, 2017

Page range: 213 - 218

Received: Mar 03, 2017

Accepted: Sep 18, 2017

DOI: https://doi.org/10.1515/msr-2017-0025

Keywordsnanorelief, monatomic steps, low-coherence, white light interferometer, subnanometer resolution

© 2017 Evgeny Sysoev et al., published by De Gruyter Open

This work is licensed under the Creative Commons Attribution-NonCommercial-NoDerivatives 3.0 License.

Keywords
nanorelief, monatomic steps, low-coherence, white light interferometer, subnanometer resolution