1. bookVolume 4 (2021): Issue 1 (April 2021)
Journal Details
License
Format
Journal
First Published
30 Jan 2019
Publication timeframe
2 times per year
Languages
English
access type Open Access

Design and Manufacture of a Microfluidic Cell To Be Used With a Spectroscopic Ellipsometer

Published Online: 08 Jul 2021
Page range: 28 - 31
Journal Details
License
Format
Journal
First Published
30 Jan 2019
Publication timeframe
2 times per year
Languages
English
Abstract

In material testing and manufacturing processes, creating thin layers is a widely used method for structure development or for surface treatment purposes. Despite its widespread use, the physical background of the layer development process is currently under-researched. Its examination requires the development of procedures and tools that, in combination with the existing tools, can help to understand these processes. The development of microfluidic cells is a way to solve this problem. In this paper, a newly developed microfluidic cell is presented, which also offers a solution to several problems encountered when using previous designs.

Keywords

[1] Renkó J. B., Bonyár A., Szabó P. J.: Mikrofluidika cella fejlesztése folyadékfázisú vékonyréteg leválasztás nyomonkövetésére. Acta Materialia Transylvanica, 3/2. (2020) 94–98. https://doi.org/10.33924/amt-2020-02-08 Search in Google Scholar

[2] A. Bonyár, P. J. Szabó: Correlation between the grain orientation dependence of color etching and chemical etching. Microscopy and Microanalysis, 18/6. (2012) 1389–1392. https://doi.org/10.1017/S1431927612013554 Search in Google Scholar

[3] Bonyár A., Renkó J., Kovács D., Szabó P. J.: Understanding the mechanism of Beraha-I type color etching: Determination of the orientation dependent etch rate, layer refractive index and a method for quantifying the angle between surface normal and the <100>, <111> directions for individual grains. Materials Characterization, 156. (2019) 109844. https://doi.org/10.1016/j.matchar.2019.109844 Search in Google Scholar

[4] Tompkins H. G.: A User’s guide to Ellipsometry. Academic Press, Inc., Mesa, Arizona, 1993. XIII–XV. Search in Google Scholar

[5] Bonyár A., Sántha H., Ring B., Varga M., Kovács J. G., Harsányi G.: 3D Rapid Prototyping Technology (RPT) as a powerful tool in microfluidic development. Procedia Engineering, 5. (2010) 291–294. https://doi.org/10.1016/j.proeng.2010.09.105 Search in Google Scholar

[6] H. D. Cho, Y. T. Jun, M. Y. Yang: Five-axis CNC milling for effective machining of sculptured surfaces. International Journal of Production Research, 31/11. (1993) 2559–2573. https://doi.org/10.1080/00207549308956883 Search in Google Scholar

[7] Tompkins H. G., Hilfiker J. N.: Spectroscopic ellipsometry: Practical application to thin film characterization. Momentum Press, LLC, New York, 2016. 31–55. Search in Google Scholar

[8] Fujiwara H.: Spectroscopic Ellipsometry: Principles and Applications. John Wiley & Sons Ltd, Chichester, 2007. 81–120. Search in Google Scholar

Recommended articles from Trend MD

Plan your remote conference with Sciendo