1. bookVolume 11 (2011): Issue 4 (August 2011)
Journal Details
License
Format
Journal
eISSN
1335-8871
First Published
07 Mar 2008
Publication timeframe
6 times per year
Languages
English
access type Open Access

Shadow Inspection of 3D Objects in Partially Coherent Light

Published Online: 21 Sep 2011
Volume & Issue: Volume 11 (2011) - Issue 4 (August 2011)
Page range: 104 - 107
Journal Details
License
Format
Journal
eISSN
1335-8871
First Published
07 Mar 2008
Publication timeframe
6 times per year
Languages
English
Shadow Inspection of 3D Objects in Partially Coherent Light

The peculiarities of 3D object image formation in a diffraction-limited system using quasi-monochromatic source with finite angular size are investigated. Algorithms for considerable increase in the accuracy of inspection of 3D objects by shadow optical method are proposed. These algorithms are based on high precision analytical determination of shift of shadow boundary image of thick object and on introduction of corrections depending on the object thickness and the optical system parameters. The theoretical results obtained have been experimentally verified.

Keywords

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