1. bookVolume 61 (2016): Issue 2 (June 2016)
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License
Format
Journal
eISSN
1508-5791
First Published
25 Mar 2014
Publication timeframe
4 times per year
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English
access type Open Access

The role of magnetic energy on plasma localization during the glow discharge under reduced pressure

Published Online: 15 Jun 2016
Volume & Issue: Volume 61 (2016) - Issue 2 (June 2016)
Page range: 191 - 194
Received: 16 Sep 2015
Accepted: 11 Nov 2015
Journal Details
License
Format
Journal
eISSN
1508-5791
First Published
25 Mar 2014
Publication timeframe
4 times per year
Languages
English
Abstract

In this work, we present the first results of our research on the synergy of fields, electric and magnetic, in the initiation and development of glow discharge under reduced pressure. In the two-electrode system under reduced pressure, the breakdown voltage characterizes a minimum energy input of the electric field to initiate and sustain the glow discharge. The glow discharge enhanced by the magnetic field applied just above the surface of the cathode influences the breakdown voltage decreasing its value. The idea of the experiment was to verify whether the contribution of potential energy of the magnetic field applied around the cathode is sufficiently effective to locate the plasma of glow discharge to the grounded cathode, which, in fact, is the part of a vacuum chamber wall (the anode is positively biased in this case). In our studies, we used the grounded magnetron unit with positively biased anode in order to achieve favorable conditions for the deposition of thin films on fibrous substrates such as fabrics for metallization, assuming that locally applied magnetic field can effectively locate plasma. The results of our studies (Paschen curve with the participation of the magnetic field) seem to confirm the validity of the research assumption. What is the most spectacular - the glow discharge was initiated between introduced into the chamber anode and the grounded cathode of magnetron ‘assisted’ by the magnetic field (discharge did not include the area of the anode, which is a part of the magnetron construction).

Keywords

1. Paschen, F. (1889). Ueber die zum Funkenübergang in Luft, Wasserstoff und Kohlensäure bei verschiedenen Drucken erforderliche Potentialdifferenz. Ann. Phys., 273(5), 69-96.10.1002/andp.18892730505Search in Google Scholar

2. Dinklage, A., Klinger, T., Marx, G., & Schweikhard, L. (2005). Plasma physics: Confinement, transport and collective effects (Chapter 5.2, pp. 98-100). Lect. Notes Phys. 670. Berlin: Springer.10.1007/b103882Search in Google Scholar

3. Petraconi, G., Maciel, H. S., Pessoa, R. S., Murakami, G., Massi, M., Otani, C., Uruchi, W. M. I., & Sismanoglu, B. N. (2004). Longitudinal magnetic field effect on the electrical breakdown in low pressure gases. Braz. J. Phys., 34(4b), 1662-1666.10.1590/S0103-97332004000800028Search in Google Scholar

4. Ledernez, L., Olcaytug, F., & Urban, G. (2012). Paschen curve and film growth in low pressure capacitively coupled magnetron plasma polymerization. Contrib. Plasma Phys., 52(4), 283-288.10.1002/ctpp.201100054Search in Google Scholar

5. Nunez, Y., Wemans, A., & Gordo, P. R. (2007). Breakdown in planar magnetron discharges of argon on copper. Vacuum, 81(11/12), 1511-1514.10.1016/j.vacuum.2007.04.026Search in Google Scholar

6. Posadowski, W. M., Wiatrowski, A., Dora, J., & Radzimski, Z. J. (2008). Magnetron sputtering process control by medium-frequency power supply parameter. Thin Solid Films, 516(14), 4478-4482.10.1016/j.tsf.2007.05.077Search in Google Scholar

7. Andres, A., Andersson, J., & Ehiasarian, A. (2007). High power impulse magnetron sputtering: Current- -voltage-time characteristics indicate the onset of sustained self-sputtering. J. Appl. Phys., 102(11), 113303-1-11.10.1063/1.2817812Search in Google Scholar

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