1. bookVolume 17 (2017): Issue 6 (December 2017)
Journal Details
License
Format
Journal
eISSN
1335-8871
First Published
07 Mar 2008
Publication timeframe
6 times per year
Languages
English
access type Open Access

Optimization of Nano-Grating Pitch Evaluation Method Based on Line Edge Roughness Analysis

Published Online: 22 Nov 2017
Volume & Issue: Volume 17 (2017) - Issue 6 (December 2017)
Page range: 264 - 268
Received: 30 Jul 2017
Accepted: 13 Nov 2017
Journal Details
License
Format
Journal
eISSN
1335-8871
First Published
07 Mar 2008
Publication timeframe
6 times per year
Languages
English
Abstract

Pitch uncertainty and line edge roughness are among the critical quality attributes of a pitch standard and normally the analyses of these two parameters are separate. The analysis of self-traceable Cr atom lithography nano-gratings shows a positive relevance and sensitivity between LER and evaluated standard deviation of pitch. Therefore, LER can be used as an aided pre-evaluation parameter for the pitch calculation method, such as the gravity center method or the zero-crossing points method. The optimization of the nano-grating evaluation method helps to obtain the accurate pitch value with fewer measurements and provide a comprehensive characterization of pitch standards.

Keywords

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